Diameter (mm)
76.2 ~ 200
Type / Dopant
N
:
Phosphorus
P
:
Boron
Gas
PH
3
、B
2
H
6
、AsH
3
Resistivity (Ω.cm)
N: 2 × 10
-3
~ 1,250
P: 1 × 10
-2
~ 100
Epi-Layer Thickness (μm)
0.1 ~ 125
* Multi layers are available
* Other customized specifications are welcome
Oxygen / Carbon
Concentration
＜2 × 10
18
/cm
2
Metallic Surface Concentration
＜2 × 10
13
/cm
2
Dislocation
＜10
3
/cm
2
Uniformity
Thickness
＜± 2%
Ge Element
＜30%
B Concentration
(Thin Film Resistivity)
＜± 3%
Particle (＞ 0.3μm)
＜ 100 pcs
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