Diameter (mm)
200 ~ 300
Growth Method
CZ
Type／Dopant
P / Boron
Crystal Orientation
<100> ± 3
。
Resistivity (Ω.cm)
0.5 ~ 100
Thickness (μm)
≧ 650
Warp (μm)
≦ 100
Surface
Front-side Polished
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