AlN wafer have the characteristics of high thermal conductivity, high heat dissipation, and high insulation, and their thermal expansion coefficient is close to that of silicon wafers.
Item / unit |
AlN Wafer |
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Thickness (µm) |
100 ~ 2000 |
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Size (inch) |
6’/8”/12” |
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Color |
Beige - Gray |
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Shape |
Rotundity |
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Through hole (mm) |
≧φ0.1 |
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Bulk density (g/cm3) |
3.4 |
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Surface roughness (µm) |
<0.8 |
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Thermal Characteristic |
Thermal conductivity |
25℃ |
W/(mK) |
180 |
200 |
230 |
Coefficient of |
40-400℃ |
×10-6/K |
4.8 |
4.8 |
4.8 |
|
Thermal expansion |
40-800℃ |
×10-6/K |
5.4 |
5.4 |
5.4 |