藍寶石晶圓
Sapphire Wafer (Al2O3)
以卓越硬度、光學透明度及熱穩定性著稱，廣泛用於 LED、射頻 (RF) 及光電應用。甚至有POWER 特殊應用。
參數
4inch
6inch
8inch
Unit
Diameter
100 ± 0.5
150 ± 0.5
200 ± 0.5
mm
Thickness
650 ± 20
1300 ± 20
1600 ± 20
µm
Surface Orientation
C-Plane (0001) tied M-axis 0.2 ;
C-Plane (0001) tied A-axis
C-Plane (0001) tied M-axis 0.2 ;
C-Plane (0001) tied A-axis
C-Plane (0001) tied M-axis 0.2 ;
C-Plane (0001) tied A-axis
degree
Primary Flat Orientation
A-Axis (11-20) ± 0.3
A-Axis (11-20) ± 0.3
A-Axis (11-20) ± 0.3
degree
Primary Flat length
30 ± 1.0
47.5 ± 1.0 or Notch
Notch
mm
Secondary Flat
None
None
None
TTV
≤7
≤10
≤30
µm
Bow
-10~0
-15~0
≤35
µm
Warp
≤35
≤35
≤35
µm
Surface
SSP / DSP
SSP / DSP
SSP / DSP
